diff --git a/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA1284RFR2.xml b/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA1284RFR2.xml
index 9b7c855a..f00ecc85 100644
--- a/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA1284RFR2.xml
+++ b/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA1284RFR2.xml
@@ -202,7 +202,7 @@
             <signals>
                 <signal name="TMS" pad-key="pf5"/>
                 <signal name="TDI" pad-key="pf7"/>
-                <signal name="TCK" pad-key="pf3/4"/>
+                <signal name="TCK" pad-key="pf3_4"/>
                 <signal name="TDO" pad-key="pf6"/>
             </signals>
         </physical-interface>
@@ -273,7 +273,7 @@
                 <signal name="PF0" pad-key="pf0" index="0" function="PORTF"/>
                 <signal name="PF1" pad-key="pf1" index="1" function="PORTF"/>
                 <signal name="PF2" pad-key="pf2" index="2" function="PORTF"/>
-                <signal name="PF3/4" pad-key="pf3/4" index="3" function="PORTF"/>
+                <signal name="PF3/4" pad-key="pf3_4" index="3" function="PORTF"/>
                 <signal name="PF5" pad-key="pf5" index="5" function="PORTF"/>
                 <signal name="PF6" pad-key="pf6" index="6" function="PORTF"/>
                 <signal name="PF7" pad-key="pf7" index="7" function="PORTF"/>
@@ -1557,7 +1557,7 @@
         </module>
     </modules>
     <pads>
-        <pad key="pf3/4" name="PF3/4"/>
+        <pad key="pf3_4" name="PF3/4"/>
         <pad key="pf5" name="PF5"/>
         <pad key="pf6" name="PF6"/>
         <pad key="pf7" name="PF7"/>
@@ -1608,7 +1608,7 @@
     </pads>
     <pinouts>
         <pinout key="qfn48" name="QFN48" type="qfn">
-            <pin position="1" pad-key="pf3/4"/>
+            <pin position="1" pad-key="pf3_4"/>
             <pin position="2" pad-key="pf5"/>
             <pin position="3" pad-key="pf6"/>
             <pin position="4" pad-key="pf7"/>
diff --git a/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA2564RFR2.xml b/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA2564RFR2.xml
index 8c914c50..eb626bc7 100644
--- a/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA2564RFR2.xml
+++ b/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA2564RFR2.xml
@@ -202,7 +202,7 @@
             <signals>
                 <signal name="TMS" pad-key="pf5"/>
                 <signal name="TDI" pad-key="pf7"/>
-                <signal name="TCK" pad-key="pf3/4"/>
+                <signal name="TCK" pad-key="pf3_4"/>
                 <signal name="TDO" pad-key="pf6"/>
             </signals>
         </physical-interface>
@@ -273,7 +273,7 @@
                 <signal name="PF0" pad-key="pf0" index="0" function="PORTF"/>
                 <signal name="PF1" pad-key="pf1" index="1" function="PORTF"/>
                 <signal name="PF2" pad-key="pf2" index="2" function="PORTF"/>
-                <signal name="PF3/4" pad-key="pf3/4" index="3" function="PORTF"/>
+                <signal name="PF3/4" pad-key="pf3_4" index="3" function="PORTF"/>
                 <signal name="PF5" pad-key="pf5" index="5" function="PORTF"/>
                 <signal name="PF6" pad-key="pf6" index="6" function="PORTF"/>
                 <signal name="PF7" pad-key="pf7" index="7" function="PORTF"/>
@@ -1558,7 +1558,7 @@
         </module>
     </modules>
     <pads>
-        <pad key="pf3/4" name="PF3/4"/>
+        <pad key="pf3_4" name="PF3/4"/>
         <pad key="pf5" name="PF5"/>
         <pad key="pf6" name="PF6"/>
         <pad key="pf7" name="PF7"/>
@@ -1609,7 +1609,7 @@
     </pads>
     <pinouts>
         <pinout key="qfn48" name="QFN48" type="qfn">
-            <pin position="1" pad-key="pf3/4"/>
+            <pin position="1" pad-key="pf3_4"/>
             <pin position="2" pad-key="pf5"/>
             <pin position="3" pad-key="pf6"/>
             <pin position="4" pad-key="pf7"/>
diff --git a/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA644RFR2.xml b/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA644RFR2.xml
index 22252b8a..a53bfa9d 100644
--- a/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA644RFR2.xml
+++ b/src/Targets/TargetDescriptionFiles/AVR8/MEGA/ATMEGA644RFR2.xml
@@ -202,7 +202,7 @@
             <signals>
                 <signal name="TMS" pad-key="pf5"/>
                 <signal name="TDI" pad-key="pf7"/>
-                <signal name="TCK" pad-key="pf3/4"/>
+                <signal name="TCK" pad-key="pf3_4"/>
                 <signal name="TDO" pad-key="pf6"/>
             </signals>
         </physical-interface>
@@ -273,7 +273,7 @@
                 <signal name="PF0" pad-key="pf0" index="0" function="PORTF"/>
                 <signal name="PF1" pad-key="pf1" index="1" function="PORTF"/>
                 <signal name="PF2" pad-key="pf2" index="2" function="PORTF"/>
-                <signal name="PF3/4" pad-key="pf3/4" index="3" function="PORTF"/>
+                <signal name="PF3/4" pad-key="pf3_4" index="3" function="PORTF"/>
                 <signal name="PF5" pad-key="pf5" index="5" function="PORTF"/>
                 <signal name="PF6" pad-key="pf6" index="6" function="PORTF"/>
                 <signal name="PF7" pad-key="pf7" index="7" function="PORTF"/>
@@ -1554,7 +1554,7 @@
         </module>
     </modules>
     <pads>
-        <pad key="pf3/4" name="PF3/4"/>
+        <pad key="pf3_4" name="PF3/4"/>
         <pad key="pf5" name="PF5"/>
         <pad key="pf6" name="PF6"/>
         <pad key="pf7" name="PF7"/>
@@ -1605,7 +1605,7 @@
     </pads>
     <pinouts>
         <pinout key="qfn48" name="QFN48" type="qfn">
-            <pin position="1" pad-key="pf3/4"/>
+            <pin position="1" pad-key="pf3_4"/>
             <pin position="2" pad-key="pf5"/>
             <pin position="3" pad-key="pf6"/>
             <pin position="4" pad-key="pf7"/>
diff --git a/src/Targets/TargetDescriptionFiles/AVR8/XMEGA/ATXMEGA128A1.xml b/src/Targets/TargetDescriptionFiles/AVR8/XMEGA/ATXMEGA128A1.xml
index 23beec7e..49e1679c 100644
--- a/src/Targets/TargetDescriptionFiles/AVR8/XMEGA/ATXMEGA128A1.xml
+++ b/src/Targets/TargetDescriptionFiles/AVR8/XMEGA/ATXMEGA128A1.xml
@@ -119,16 +119,16 @@
         <peripheral key="evsys" name="EVSYS" module-key="i6061">
             <register-group-instance register-group-key="evsys" address-space-key="data" offset="0x180"/>
         </peripheral>
-        <peripheral key="nvm" name="NVM" module-key="i6076-revh">
+        <peripheral key="nvm" name="NVM" module-key="i6076_revh">
             <register-group-instance register-group-key="nvm" address-space-key="data" offset="0x1C0"/>
         </peripheral>
-        <peripheral key="fuse" name="FUSE" module-key="i6076-revh">
+        <peripheral key="fuse" name="FUSE" module-key="i6076_revh">
             <register-group-instance key="fuse" name="FUSE" register-group-key="nvm_fuses" address-space-key="fuses" offset="0x0"/>
         </peripheral>
-        <peripheral key="lockbit" name="LOCKBIT" module-key="i6076-revh">
+        <peripheral key="lockbit" name="LOCKBIT" module-key="i6076_revh">
             <register-group-instance register-group-key="nvm_lockbits" address-space-key="lockbits" offset="0x0"/>
         </peripheral>
-        <peripheral key="prod_signatures" name="PROD_SIGNATURES" module-key="i6076-revh">
+        <peripheral key="prod_signatures" name="PROD_SIGNATURES" module-key="i6076_revh">
             <register-group-instance register-group-key="nvm_prod_signatures" address-space-key="prod_signatures" offset="0x0"/>
         </peripheral>
         <peripheral key="aca" name="ACA" module-key="i6077">
@@ -794,7 +794,7 @@
                 <register key="data" name="DATA" description="Event Data" offset="0x11" size="1"/>
             </register-group>
         </module>
-        <module key="i6076-revh" name="NVM" description="Non Volatile Memory Controller">
+        <module key="i6076_revh" name="NVM" description="Non Volatile Memory Controller">
             <register-group key="nvm" name="NVM">
                 <register key="addr0" name="ADDR0" description="Address Register 0" offset="0x00" size="1"/>
                 <register key="addr1" name="ADDR1" description="Address Register 1" offset="0x01" size="1"/>
diff --git a/src/Targets/TargetDescriptionFiles/AVR8/XMEGA/ATXMEGA64A1.xml b/src/Targets/TargetDescriptionFiles/AVR8/XMEGA/ATXMEGA64A1.xml
index 9244fa06..b8dbbe34 100644
--- a/src/Targets/TargetDescriptionFiles/AVR8/XMEGA/ATXMEGA64A1.xml
+++ b/src/Targets/TargetDescriptionFiles/AVR8/XMEGA/ATXMEGA64A1.xml
@@ -119,16 +119,16 @@
         <peripheral key="evsys" name="EVSYS" module-key="i6061">
             <register-group-instance register-group-key="evsys" address-space-key="data" offset="0x180"/>
         </peripheral>
-        <peripheral key="nvm" name="NVM" module-key="i6076-revh">
+        <peripheral key="nvm" name="NVM" module-key="i6076_revh">
             <register-group-instance register-group-key="nvm" address-space-key="data" offset="0x1C0"/>
         </peripheral>
-        <peripheral key="fuse" name="FUSE" module-key="i6076-revh">
+        <peripheral key="fuse" name="FUSE" module-key="i6076_revh">
             <register-group-instance key="fuse" name="FUSE" register-group-key="nvm_fuses" address-space-key="fuses" offset="0x0"/>
         </peripheral>
-        <peripheral key="lockbit" name="LOCKBIT" module-key="i6076-revh">
+        <peripheral key="lockbit" name="LOCKBIT" module-key="i6076_revh">
             <register-group-instance register-group-key="nvm_lockbits" address-space-key="lockbits" offset="0x0"/>
         </peripheral>
-        <peripheral key="prod_signatures" name="PROD_SIGNATURES" module-key="i6076-revh">
+        <peripheral key="prod_signatures" name="PROD_SIGNATURES" module-key="i6076_revh">
             <register-group-instance register-group-key="nvm_prod_signatures" address-space-key="prod_signatures" offset="0x0"/>
         </peripheral>
         <peripheral key="aca" name="ACA" module-key="i6077">
@@ -794,7 +794,7 @@
                 <register key="data" name="DATA" description="Event Data" offset="0x11" size="1"/>
             </register-group>
         </module>
-        <module key="i6076-revh" name="NVM" description="Non Volatile Memory Controller">
+        <module key="i6076_revh" name="NVM" description="Non Volatile Memory Controller">
             <register-group key="nvm" name="NVM">
                 <register key="addr0" name="ADDR0" description="Address Register 0" offset="0x00" size="1"/>
                 <register key="addr1" name="ADDR1" description="Address Register 1" offset="0x01" size="1"/>